Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837445 | Substrate processing device and substrate processing method | — | 2023-12-05 |
| 11726134 | Substrate inspection device and substrate inspection method | Gu Hyun JUNG, Young Rok Kim, Se-Yong Oh, Jin An JUNG | 2023-08-15 |
| 11651941 | Apparatus for distributing gas, and apparatus and method for processing substrate | Min Ho CHEON, Jong Sik Kim | 2023-05-16 |