SS

Shigeru Shirayone

HH Hitachi High-Technologies: 1 patents #104 of 389Top 30%
Overall (2023): #254,062 of 537,848Top 50%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11664233 Method for releasing sample and plasma processing apparatus using same Masaki Ishiguro, Masahiro Sumiya, Tomoyuki Tamura, Kazuyuki Ikenaga 2023-05-30