Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742214 | Plasma processing method | Junya Sasaki | 2023-08-29 |
| 11664233 | Method for releasing sample and plasma processing apparatus using same | Masaki Ishiguro, Shigeru Shirayone, Tomoyuki Tamura, Kazuyuki Ikenaga | 2023-05-30 |