Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11709423 | Methods of greytone imprint lithography to fabricate optical devices | Kang Luo, Erica Chen, Yongan Xu | 2023-07-25 |
| 11543793 | Developer critical dimension control with pulse development | Richard C. Johnson, Yongan Xu | 2023-01-03 |