Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728168 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim | 2023-08-15 |