Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728139 | Process chamber for cyclic and selective material removal and etching | Soonam Park, Junghoon Kim, Dmitry Lubomirsky | 2023-08-15 |
| 11700801 | Alternate wetting and drying (AWD) system and method | My T. Nguyen, Cuong Q. Hong, Luong V. Truong, Trieu T. Le, Bien T. Mai +3 more | 2023-07-18 |
| 11594428 | Low temperature chuck for plasma processing systems | Zilu Weng, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho, Soonam Park +2 more | 2023-02-28 |