Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710647 | Hyperbaric clean method and apparatus for cleaning semiconductor chamber components | Richard W. Plavidal, David W. Groechel, Gang Peng, John Z. Smith | 2023-07-25 |
| D984895 | Packaging insert for a process chamber component | Joseph Behnke, Trevor Edward Wilantewicz, Christopher Laurent Beaudry, Timothy Douglas Toth | 2023-05-02 |