Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772234 | Small batch polishing fluid delivery for CMP | Kirk Liebscher | 2023-10-03 |
| 11715193 | Color imaging for CMP monitoring | Dominic J. Benvegnu, Boguslaw A. Swedek, Abraham Ravid | 2023-08-01 |