Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694908 | Gasbox for semiconductor processing chamber | Yunzhe Yang, Abhijit A. Kangude, Kedar Joshi | 2023-07-04 |
| 11594409 | Systems and methods for depositing low-k dielectric films | Shaunak Mukherjee, Kang Sub Yim, Deenesh Padhi, Abhijit A. Kangude, Shubham Chowdhuri | 2023-02-28 |