PS

Paul Silverstein

AT Axcelis Technologies: 1 patents #7 of 21Top 35%
📍 Somerville, MA: #204 of 604 inventorsTop 35%
🗺 Massachusetts: #4,972 of 14,338 inventorsTop 35%
Overall (2023): #299,816 of 537,848Top 60%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11545330 Ion source with multiple bias electrodes Wilhelm Platow, Neil J. Bassom, Marvin Farley, David Sporleder 2023-01-03