Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721566 | Sensor assembly and methods of vapor monitoring in process chambers | Xiaozhou Che, Graeme Scott, Richard Hagborg, Alan Ouye | 2023-08-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721566 | Sensor assembly and methods of vapor monitoring in process chambers | Xiaozhou Che, Graeme Scott, Richard Hagborg, Alan Ouye | 2023-08-08 |