Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11615944 | Remote plasma oxidation chamber | Christopher S. Olsen, Eric Kihara Shono, Agus Sofian Tjandra, Chaitanya A. PRASAD, Sairaju Tallavarjula | 2023-03-28 |
| 11581408 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Canfeng Lai, Bernard L. Hwang, Jeffrey Tobin +2 more | 2023-02-14 |