Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699571 | Semiconductor processing chambers for deposition and etch | Ravikumar Patil, Vijet Patil, Carlaton WONG, Adam J. Fischbach, Timothy Franklin +2 more | 2023-07-11 |
| 11574826 | High-density substrate processing systems and methods | Jason M. Schaller, Steve Hongkham, Charles T. Carlson, Tuan Nguyen, Swaminathan Srinivasan | 2023-02-07 |