Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11692732 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, John Drewery, Alex Paterson | 2023-07-04 |
| 11605546 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Alex Paterson | 2023-03-14 |