Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837447 | Workpiece processing apparatus with plasma and thermal processing systems | Dixit V. Desai, Alex Wansidler, Dieter Hezler, Rolf Bremensdorfer, Pete Lembesis +1 more | 2023-12-05 |
| 11810802 | Substrate support in a millisecond anneal system | — | 2023-11-07 |
| 11721539 | Arc lamp with forming gas for thermal processing systems | Michael X. Yang, Rolf Bremensdorfer, Dave Camm, Dieter Hezler, Shawming Ma +1 more | 2023-08-08 |
| 11644817 | Control system for adaptive control of a thermal processing system | Michael X. Yang, Markus Lieberer | 2023-05-09 |