Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594429 | Plasma etching chemistries of high aspect ratio features in dielectrics | Keren Jacobs Kanarik, Samantha Tan, Yang Pan | 2023-02-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594429 | Plasma etching chemistries of high aspect ratio features in dielectrics | Keren Jacobs Kanarik, Samantha Tan, Yang Pan | 2023-02-28 |