JM

Jeffrey Marks

Lam Research: 1 patents #79 of 269Top 30%
Overall (2023): #401,164 of 537,848Top 75%
1
Patents 2023

Issued Patents 2023

Patent #TitleCo-InventorsDate
11594429 Plasma etching chemistries of high aspect ratio features in dielectrics Keren Jacobs Kanarik, Samantha Tan, Yang Pan 2023-02-28