Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11709477 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Todd Egan, Prashant Aji +2 more | 2023-07-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11709477 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Todd Egan, Prashant Aji +2 more | 2023-07-25 |