Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688636 | Spin on scaffold film for forming topvia | Somnath Ghosh, Karen E. Petrillo, Ekmini Anuja De Silva, Chi-Chun Liu, Dominik Metzler +1 more | 2023-06-27 |
| 11561481 | Using E0 exposures for track/cluster monitoring | Ekmini Anuja De Silva, Christopher F. Robinson, Luciana Meli | 2023-01-24 |