Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834743 | Segmented showerhead for uniform delivery of multiple precursors | Prashanth Kothnur, Roey Shaviv, Satish Radhakrishnan | 2023-12-05 |
| 11756816 | Carrier FOUP and a method of placing a carrier | Steven Trey Tindel, Kim Vellore | 2023-09-12 |
| 11692261 | Evaporator chamber for forming films on substrates | Roey Shaviv, Satish Radhakrishnan | 2023-07-04 |
| 11637004 | Alignment module with a cleaning chamber | Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore, Kevin Moraes +1 more | 2023-04-25 |
| 11631813 | Deposition mask and methods of manufacturing and using a deposition mask | Kevin Moraes | 2023-04-18 |