Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11731871 | Actuator layer patterning with polysilicon and etch stop layer | Daesung Lee, Alan Cuthbertson | 2023-08-22 |
| 11542154 | Sensor with dimple features and improved out-of-plane stiction | Daesung Lee, Alan Cuthbertson | 2023-01-03 |