Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11731871 | Actuator layer patterning with polysilicon and etch stop layer | Ashfaque Uddin, Daesung Lee | 2023-08-22 |
| 11661332 | Stiction reduction system and method thereof | Daesung Lee, Ian Flader, Emad Mehdizadeh | 2023-05-30 |
| 11618674 | Actuator layer patterning with topography | Daesung Lee | 2023-04-04 |
| 11542154 | Sensor with dimple features and improved out-of-plane stiction | Ashfaque Uddin, Daesung Lee | 2023-01-03 |