Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11634814 | Atomic layer deposition apparatus | Ville Miikkulainen, Hulda Aminoff | 2023-04-25 |
| 11549702 | Precursor supply cabinet | Johannes Wesslin, Matti Malila | 2023-01-10 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11634814 | Atomic layer deposition apparatus | Ville Miikkulainen, Hulda Aminoff | 2023-04-25 |
| 11549702 | Precursor supply cabinet | Johannes Wesslin, Matti Malila | 2023-01-10 |