Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11634814 | Atomic layer deposition apparatus | Hulda Aminoff, Pekka Soininen | 2023-04-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11634814 | Atomic layer deposition apparatus | Hulda Aminoff, Pekka Soininen | 2023-04-25 |