Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740559 | Apparatuses for reducing metal residue in edge bead region from metal-containing resists | Brian J. Cardineau, Kai-Li Jiang, Alan J. Telecky, Stephen T. Meyers, Benjamin L. Clark | 2023-08-29 |