Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809081 | Organotin oxide hydroxide patterning compositions, precursors, and patterning | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +1 more | 2023-11-07 |
| 11754924 | Organotin oxide hydroxide patterning compositions, precursors, and patterning | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +1 more | 2023-09-12 |
| 11740559 | Apparatuses for reducing metal residue in edge bead region from metal-containing resists | Mollie Waller, Kai-Li Jiang, Alan J. Telecky, Stephen T. Meyers, Benjamin L. Clark | 2023-08-29 |
| 11599021 | Photoresist compositions and methods for fabricating semiconductor devices using the same | Chawon Koh, Tsunehiro Nishi, Sangyoon Woo, Jason K. Stowers, Soo Young Choi | 2023-03-07 |