Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11782411 | System and method for mitigating overlay distortion patterns caused by a wafer bonding tool | Franz Zach, Mark D. Smith | 2023-10-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11782411 | System and method for mitigating overlay distortion patterns caused by a wafer bonding tool | Franz Zach, Mark D. Smith | 2023-10-10 |