Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810753 | Methods of determining aberrations of a charged particle beam, and charged particle beam system | Dominik Ehberger, John Breuer | 2023-11-07 |
| 11791128 | Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system | Dominik Ehberger, John Breuer | 2023-10-17 |