Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810753 | Methods of determining aberrations of a charged particle beam, and charged particle beam system | John Breuer, Matthias Firnkes | 2023-11-07 |
| 11791128 | Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system | John Breuer, Matthias Firnkes | 2023-10-17 |
| 11545338 | Charged particle beam apparatus and method of controlling sample charge | John Breuer, Alex Goldenshtein | 2023-01-03 |