Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604421 | Overlay mark, overlay measurement method and semiconductor device manufacturing method using the overlay mark | Sung-Hoon Hong, Hyun Chui Lee, Jack Woo | 2023-03-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604421 | Overlay mark, overlay measurement method and semiconductor device manufacturing method using the overlay mark | Sung-Hoon Hong, Hyun Chui Lee, Jack Woo | 2023-03-14 |