Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11701635 | Material, filter, and device for removing contaminant | Sangmin Ji, Hyukjae Kwon, Dongsik Yang | 2023-07-18 |
| 11604421 | Overlay mark, overlay measurement method and semiconductor device manufacturing method using the overlay mark | Sung-Hoon Hong, Hyun Jin Chang, Jack Woo | 2023-03-14 |