Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789435 | Flow control device, diagnostic method, and program for flow control device | Kentaro Nagai, Tsai Wei Tseng | 2023-10-17 |
| 11644852 | Flow rate ratio control system, film forming system, abnormality diagnosis method, and abnormality diagnosis program medium | Yusuke Kanamaru, Kazuya Shakudo | 2023-05-09 |