Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11680646 | Fluid control valve, fluid control device, valve element, and method of manufacturing valve element | — | 2023-06-20 |
| 11644852 | Flow rate ratio control system, film forming system, abnormality diagnosis method, and abnormality diagnosis program medium | Yusuke Kanamaru, Kotaro Takijiri | 2023-05-09 |