Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11598430 | Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device | Daihi TSUCHIGUCHI, Ryutaro Tanno, Yuya Suzuki, Kenta KONDO, Tomohiro Nakata +2 more | 2023-03-07 |
| 11569101 | Fluid supply device and fluid supply method | Yukio Minami, Tsutomu Shinohara | 2023-01-31 |