Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11598430 | Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device | Toshihide Yoshida, Ryutaro Tanno, Yuya Suzuki, Kenta KONDO, Tomohiro Nakata +2 more | 2023-03-07 |