Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776825 | Chamber for degassing substrates | Martin Schäfer, Jurgen Weichart | 2023-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776825 | Chamber for degassing substrates | Martin Schäfer, Jurgen Weichart | 2023-10-03 |