Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776825 | Chamber for degassing substrates | Rogier Lodder, Martin Schäfer | 2023-10-03 |
| 11742187 | RF capacitive coupled etch reactor | Johannes Weichart | 2023-08-29 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776825 | Chamber for degassing substrates | Rogier Lodder, Martin Schäfer | 2023-10-03 |
| 11742187 | RF capacitive coupled etch reactor | Johannes Weichart | 2023-08-29 |