Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610795 | Membrane diffuser for a substrate container | Mark V. Smith, Nicholas Thelen, Michael C. Zabka, Sung In Moon, John P. Puglia | 2023-03-21 |
| 11587810 | Wafer cushion | Colton J. Harr | 2023-02-21 |
| 11551957 | Purge connectors and modules for a substrate container | Shawn D. Eggum, Mark V. Smith | 2023-01-10 |