MS

Mark V. Smith

EN Entegris: 2 patents #18 of 121Top 15%
Overall (2023): #128,317 of 537,848Top 25%
2
Patents 2023

Issued Patents 2023

Patent #TitleCo-InventorsDate
11610795 Membrane diffuser for a substrate container Nicholas Thelen, Matthew A. Fuller, Michael C. Zabka, Sung In Moon, John P. Puglia 2023-03-21
11551957 Purge connectors and modules for a substrate container Shawn D. Eggum, Matthew A. Fuller 2023-01-10