RL

Rebecca Leghziel

E( Ecole Polytechnique Federale De Lausanne (Epfl): 1 patents #15 of 116Top 15%
Overall (2023): #284,662 of 537,848Top 55%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11735478 System and method for removing scalloping and tapering effects in high aspect ratio through-silicon vias of wafers Simone Frasca, Edoardo Charbon, Sandro Carrara 2023-08-22