Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11839947 | Pad-temperature regulating apparatus, and polishing apparatus | Keisuke Kamiki, Toru Maruyama | 2023-12-12 |
| 11577357 | Temperature adjusting device and polishing device | — | 2023-02-14 |