Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11839947 | Pad-temperature regulating apparatus, and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2023-12-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11839947 | Pad-temperature regulating apparatus, and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2023-12-12 |