Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11833641 | Cleaning method for optical surface monitoring device | — | 2023-12-05 |
| 11759913 | Polishing method and polishing apparatus | Keita Yagi, Yoichi Shiokawa, Yuki Watanabe, Nachiketa CHAUHAN | 2023-09-19 |