SI

Satoshi Itoh

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #268,829 of 537,848Top 50%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11574808 Plasma processing method and plasma processing apparatus Norifumi Kohama, Soudai EMORI, Nathan Ip 2023-02-07