Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11608471 | Composition for etching silicon nitride film and etching method using same | Ki Wook Hwang, Sang-Ran Koh, Jung Min Choi, Kwen-Woo Han, Jun-Young Jang +1 more | 2023-03-21 |
| 11560495 | CMP slurry composition for polishing tungsten pattern wafer and method of polishing tungsten pattern wafer using the same | Won Jung Kim, Yoon Young KOO, Tae Won Park, Eui Rang LEE, Jong Won Lee | 2023-01-24 |