Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11608471 | Composition for etching silicon nitride film and etching method using same | Ki Wook Hwang, Sang-Ran Koh, Youn-Jin Cho, Jung Min Choi, Kwen-Woo Han +1 more | 2023-03-21 |