Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835869 | Exposure apparatus, exposure method, and method of manufacturing article | Kazuki Ota, Takafumi Miyaharu, Masaki Imai | 2023-12-05 |
| 11624679 | Optical probe, optical probe array, test system and test method | Michitaka Okuta, Toshinaga Takeya, Shou Harako, Jukiya Fukushi, Minoru Sato +1 more | 2023-04-11 |
| 11586116 | Measurement apparatus, exposure apparatus, and article manufacturing method | — | 2023-02-21 |