Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835869 | Exposure apparatus, exposure method, and method of manufacturing article | Kazuki Ota, Yuki Saito, Masaki Imai | 2023-12-05 |
| 11656547 | Imprint apparatus, imprinting method, and product manufacturing method | Naoki Murasato | 2023-05-23 |