| 11784030 |
Plasma processing apparatus |
Atsushi Takeda, Takayuki Moriwaki, Tadashi Inoue, Masaharu Tanabe, Kazunari Sekiya +2 more |
2023-10-10 |
| 11756773 |
Plasma processing apparatus |
Kazunari Sekiya, Masaharu Tanabe, Tadashi Inoue, Hiroshi Sasamoto, Nobuaki Tsuchiya |
2023-09-12 |
| 11724321 |
Hole drilling machine and method for drilling oval hole and inner-diameter-changing hole by means of hole drilling machine |
Munehiro Murakami, Toshio Suzuki, Taketo Nakamura, Kazushige Morozumi, Yuya Masuda +1 more |
2023-08-15 |
| 11626270 |
Plasma processing apparatus |
Tadashi Inoue, Masaharu Tanabe, Kazunari Sekiya, Hiroshi Sasamoto, Nobuaki Tsuchiya |
2023-04-11 |
| 11600469 |
Plasma processing apparatus |
Atsushi Takeda, Takayuki Moriwaki, Tadashi Inoue, Masaharu Tanabe, Kazunari Sekiya +2 more |
2023-03-07 |
| 11600466 |
Plasma processing apparatus, plasma processing method, and memory medium |
Masaharu Tanabe, Kazunari Sekiya, Tadashi Inoue, Hiroshi Sasamoto, Nobuaki Tsuchiya +1 more |
2023-03-07 |
| 11569070 |
Plasma processing apparatus |
Kazunari Sekiya, Masaharu Tanabe, Tadashi Inoue, Hiroshi Sasamoto, Nobuaki Tsuchiya |
2023-01-31 |
