Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784030 | Plasma processing apparatus | Atsushi Takeda, Takayuki Moriwaki, Tadashi Inoue, Masaharu Tanabe, Hiroshi Sasamoto +2 more | 2023-10-10 |
| 11756773 | Plasma processing apparatus | Masaharu Tanabe, Tadashi Inoue, Hiroshi Sasamoto, Tatsunori Sato, Nobuaki Tsuchiya | 2023-09-12 |
| 11626270 | Plasma processing apparatus | Tadashi Inoue, Masaharu Tanabe, Hiroshi Sasamoto, Tatsunori Sato, Nobuaki Tsuchiya | 2023-04-11 |
| 11600466 | Plasma processing apparatus, plasma processing method, and memory medium | Masaharu Tanabe, Tadashi Inoue, Hiroshi Sasamoto, Tatsunori Sato, Nobuaki Tsuchiya +1 more | 2023-03-07 |
| 11600469 | Plasma processing apparatus | Atsushi Takeda, Takayuki Moriwaki, Tadashi Inoue, Masaharu Tanabe, Hiroshi Sasamoto +2 more | 2023-03-07 |
| 11569070 | Plasma processing apparatus | Masaharu Tanabe, Tadashi Inoue, Hiroshi Sasamoto, Tatsunori Sato, Nobuaki Tsuchiya | 2023-01-31 |