Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761913 | Transmission X-ray critical dimension (T-XCD) characterization of shift and tilt of stacks of high-aspect-ratio (HAR) structures | Adam Ginsburg, Mark Vermeulen, Paul Ryan | 2023-09-19 |
| 11703464 | Small-angle x-ray scatterometry | Alex Dikopoltsev, Yuri Vinshtein, Alexander Krokhmal | 2023-07-18 |